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5 March 2021 Femtosecond-laser direct writing of electrically conductive structures on PDMS for flexible device applications
Shuichiro Hayashi, Fumiya Morosawa, Mitsuhiro Terakawa
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Proceedings Volume 11673, Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XXVI; 1167310 (2021) https://doi.org/10.1117/12.2577086
Event: SPIE LASE, 2021, Online Only
Abstract
The surface of native polydimethylsiloxane (PDMS) was modified into black structures by irradiation of femtosecond laser pulses. Material analysis conducted on the modified areas revealed the formation of silicon carbide (SiC) nanocrystals, as well as multilayer graphitic carbon. Furthermore, electrical conductivity measurements of structures fabricated using various fabrication parameters, suggest that the amount of defect in the formed graphitic carbon affects the electrical conductivity of the fabricated structures. A preliminary demonstration of strain sensing was performed using the structures fabricated, indicating the potential of the structures fabricated by the femtosecond-laser-based modification of PDMS for flexible device applications.
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Shuichiro Hayashi, Fumiya Morosawa, and Mitsuhiro Terakawa "Femtosecond-laser direct writing of electrically conductive structures on PDMS for flexible device applications", Proc. SPIE 11673, Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XXVI, 1167310 (5 March 2021); https://doi.org/10.1117/12.2577086
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KEYWORDS
Carbon
Silicon carbide
Crystals
Polymers
Transmission electron microscopy
Laser applications
Laser irradiation
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