Study of the ablation regimes of thin copper films on dielectric substrates by nanoseconds laser pulses

I. I. Rasulov; I. O. Kozhevnikov; A. A. Serdobintsev; V. S. Atkin; A. M. Zakharevich; A. V. Starodubov

doi:10.1117/12.2591042

4 May 2021 Study of the ablation regimes of thin copper films on dielectric substrates by nanoseconds laser pulses

I. I. Rasulov, I. O. Kozhevnikov, A. A. Serdobintsev, V. S. Atkin, A. M. Zakharevich, A. V. Starodubov

Proceedings Volume 11846, Saratov Fall Meeting 2020: Laser Physics, Photonic Technologies, and Molecular Modeling; 118460A (2021) https://doi.org/10.1117/12.2591042
Event: Saratov Fall Meeting 2020, 2020, Saratov, Russian Federation

Abstract

In recent decades, there has been a steady trend towards the miniaturization of electronic devices, and their key components. Fabrication of such microsized devices and their key part is a real challenge. One of the well-known methods of microfabrication is laser ablation based micromachining. In this work, we study the peculiarities of the influence of nanosecond laser pulses on thin copper films on dielectric substrates. The main aim of this work is to reveal the effective regime of nanosecond ablation of the copper thin film with different thicknesses. The deposition of a copper thin film on the dielectric substrate was carried out by magnetron sputtering. Glass slides were used as dielectric substrates. To quantitatively describe the interaction of a thin copper film with laser pulses of nanoseconds duration, the fluence was calculated taking into account the velocity of the laser spot. The threshold of fluence that needs to effectively ablate the rectangular region of the copper film with a certain thickness was revealed. The obtained results will be used in the future in precision microfabrication of planar electromagnetic structures for vacuum electron devices operating in millimeter-wave bands.

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I. I. Rasulov, I. O. Kozhevnikov, A. A. Serdobintsev, V. S. Atkin, A. M. Zakharevich, and A. V. Starodubov "Study of the ablation regimes of thin copper films on dielectric substrates by nanoseconds laser pulses", Proc. SPIE 11846, Saratov Fall Meeting 2020: Laser Physics, Photonic Technologies, and Molecular Modeling, 118460A (4 May 2021); https://doi.org/10.1117/12.2591042

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