Investigation of atomic emission from tin and heavier elements to heavier elements for further optimization and extension to shorter wavelength of the EUV sources

Akira Sasaki

doi:10.1117/12.2613825

26 May 2022 Investigation of atomic emission from tin and heavier elements to heavier elements for further optimization and extension to shorter wavelength of the EUV sources

Akira Sasaki

Author Affiliations +

Proceedings Volume 12051, Optical and EUV Nanolithography XXXV; 120510N (2022) https://doi.org/10.1117/12.2613825
Event: SPIE Advanced Lithography + Patterning, 2022, San Jose, California, United States

Conference Poster

Abstract

We investigate the collisional radiative (CR) model of tin and heavier elements, to accurately predict their EUV emission spectrum to have a useful tool for the optimization of the source to obtain high output power and efficiency at 13.5 nm, as well as in 6 – 7 nm region. Although, tin and heavy elements have a complex atomic structure and the emission occurs through a large number of fine structure transitions, their observed spectrum usually consists of few broad peaks, which are attributed to 4d-4f, 4p-4d, 4d-5p, and 4d-5f transitions. We show a simple representation of their wavelength from the investigation of theoretical and experimental spectrum.

Conference Presentation

Citation Download Citation

Akira Sasaki "Investigation of atomic emission from tin and heavier elements to heavier elements for further optimization and extension to shorter wavelength of the EUV sources", Proc. SPIE 12051, Optical and EUV Nanolithography XXXV, 120510N (26 May 2022); https://doi.org/10.1117/12.2613825

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

;

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE