Surface roughness detection method of optical elements based on region scattering

Hongjun Wang; Chen Wei; Ailing Tian; Bingcai Liu; Xueliang Zhu

doi:10.1117/12.2605355

13 December 2021 Surface roughness detection method of optical elements based on region scattering

Hongjun Wang, Chen Wei, Ailing Tian, Bingcai Liu, Xueliang Zhu

Proceedings Volume 12073, 10th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Advanced and Extreme Micro-Nano Manufacturing Technologies; 120730N (2021) https://doi.org/10.1117/12.2605355
Event: Tenth International Symposium on Advanced Optical Manufacturing and Testing Technologies (AOMATT 2021), 2021, Chengdu, China

Abstract

To achieve rapid and accurate detection of the surface roughness of optical elements, a surface roughness detection method based on region scattering was proposed in this paper. Firstly, starting from the basic principle of the angle-resolved scattering method, a surface roughness detection model based on the area scattering distribution is established. Then, the influence of incident angle, incident wavelength, etc. on the scattering distribution is simulated and analyzed, and the best sampling region of the scattering distribution is determined. Finally, the experiment completes the acquisition and processing of the surface scattering distribution of the optical elements, and the dynamic range of the scattering distribution is improved through the fusion of the multi-exposure scattering image, thereby realized the high-precision detection of surface roughness. Take optical components as test objects, the experimental results show that the use of regional scattering signals to characterize the surface roughness of components can improve the measurement speed while ensuring the measurement accuracy.

Citation Download Citation

Hongjun Wang, Chen Wei, Ailing Tian, Bingcai Liu, and Xueliang Zhu "Surface roughness detection method of optical elements based on region scattering", Proc. SPIE 12073, 10th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Advanced and Extreme Micro-Nano Manufacturing Technologies, 120730N (13 December 2021); https://doi.org/10.1117/12.2605355

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