Adsorption and decomposition of chemisorbed propylene on the Si (100)-(2x1) surface: a laser-induced thermal desorption study

Kumar Sinniah; Mike G. Sherman; John T. Yates Jr.; Kenneth C. Janda

doi:10.1117/12.17870

1 July 1990 Adsorption and decomposition of chemisorbed propylene on the Si(100)-(2×1) surface: a laser-induced thermal desorption study

Kumar Sinniah, Mike G. Sherman, John T. Yates Jr., Kenneth C. Janda

Author Affiliations +

Proceedings Volume 1208, Laser Photoionization and Desorption Surface Analysis Techniques; (1990) https://doi.org/10.1117/12.17870
Event: OE/LASE '90, 1990, Los Angeles, CA, United States

Abstract

Deuterated propylene (C₃D₆) chemisorption and decomposition on the Si(100)-(2x1) surface has been studied in ultrahigh vacuum by using laser induced thermal desorption (LITD) and temperature programmed desorption techniques (TPD). Propylene was found to adsorb molecularly at 110 K and to remain as an undecomposed molecular adsorbate up to approximately 500 K. As the surface temperature is increased, the propylene can both thermally desorb and decompose, ultimately producing a SiC thin film. LITD was used to study C₃D₆ and D₂ desorption as a function of surface temperature during temperature programming. Slow heating leads to strongly enhanced C₃D₆ decomposition compared to fast heating by laser irradiation. The decomposition of propylene is apparently a multistep process because deuterium is released from the chemisorbed propylene (and its fragments) over a temperature range from approximately 450 to 850 K. D₂ desorption from the decomposition of C₃D₆ occurs at higher temperatures compared to that observed for chemisorbed deuterium.

Citation Download Citation

Kumar Sinniah, Mike G. Sherman, John T. Yates Jr., and Kenneth C. Janda "Adsorption and decomposition of chemisorbed propylene on the Si(100)-(2×1) surface: a laser-induced thermal desorption study", Proc. SPIE 1208, Laser Photoionization and Desorption Surface Analysis Techniques, (1 July 1990); https://doi.org/10.1117/12.17870

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