Effect of annealing on electrical and optical properties of TiN thin films

Taras T. Kovaliuk; Mykhailo M. Solovan; Andrii I. Mostovyi; Ivan G. Оrletskyi

doi:10.1117/12.2615178

20 December 2021 Effect of annealing on electrical and optical properties of TiN thin films

Taras T. Kovaliuk, Mykhailo M. Solovan, Andrii I. Mostovyi, Ivan G. Оrletskyi

Proceedings Volume 12126, Fifteenth International Conference on Correlation Optics; 121260B (2021) https://doi.org/10.1117/12.2615178
Event: Fifteenth International Conference on Correlation Optics, 2021, Chernivtsi, Ukraine

Abstract

TiN thin films were deposited are deposited by DC reactive magnetron sputtering. The effect of annealing on the electrical and optical properties of the thin films was investigated. Temperature dependences of the resistance R of the TiN films were measured within the temperature range T ÷ 295-420 K. There was established that all samples under investigation had n-type of conductivity. Based on the dependences (αhν)² = f(hν), the presence of direct allowed interband optical transitions in the TiN thin films is established and the optical band gap values before and after annealing are determined. Annealing in nitrogen atmospheres led to an increase in the optical width of the band gap, which may be due to deviations from the stoichiometric composition of thin TiN films during heat treatment.

Citation Download Citation

Taras T. Kovaliuk, Mykhailo M. Solovan, Andrii I. Mostovyi, and Ivan G. Оrletskyi "Effect of annealing on electrical and optical properties of TiN thin films", Proc. SPIE 12126, Fifteenth International Conference on Correlation Optics, 121260B (20 December 2021); https://doi.org/10.1117/12.2615178

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available