Reconstructing phase aberrations for high-precision dimensional microscopy

Philipp-Immanuel Schneider; Phillip Manley; Jan Krüger; Lin Zschiedrich; Rainer Köning; Bernd Bodermann; Sven Burger

doi:10.1117/12.2620762

20 May 2022 Reconstructing phase aberrations for high-precision dimensional microscopy

Philipp-Immanuel Schneider, Phillip Manley, Jan Krüger, Lin Zschiedrich, Rainer Köning, Bernd Bodermann, Sven Burger

Author Affiliations +

Proceedings Volume 12137, Optics and Photonics for Advanced Dimensional Metrology II; 121370I (2022) https://doi.org/10.1117/12.2620762
Event: SPIE Photonics Europe, 2022, Strasbourg, France

Abstract

In many industrial sectors, dimensional microscopy enables non-destructive and rapid inspection of manufacturing processes. However, wave-optical effects and imaging errors of the optical system limit the accuracy. With modelbased approaches it is possible to measure the physical position of edges and corners with submicron uncertainty. This requires an accurate model for phase aberrations of the optical system. We present a method to model and quantify those phase aberrations by an efficient inverse measurement.

Citation Download Citation

Philipp-Immanuel Schneider, Phillip Manley, Jan Krüger, Lin Zschiedrich, Rainer Köning, Bernd Bodermann, and Sven Burger "Reconstructing phase aberrations for high-precision dimensional microscopy", Proc. SPIE 12137, Optics and Photonics for Advanced Dimensional Metrology II, 121370I (20 May 2022); https://doi.org/10.1117/12.2620762

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