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15 February 2022 Ultra-high phase transition amplitude of Fe-doped high-performance VO2 films manufactured by DC-magnetron sputtering for modulation application
Zihao Xiang, Zhiming Wu, Yuanlin Shi, Xiang Dong, Chunyu Li, Xuanru Chen, Jun Wang, Yadong Jiang
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Proceedings Volume 12166, Seventh Asia Pacific Conference on Optics Manufacture and 2021 International Forum of Young Scientists on Advanced Optical Manufacturing (APCOM and YSAOM 2021); 121662I (2022) https://doi.org/10.1117/12.2615477
Event: Seventh Asia Pacific Conference on Optics Manufacture and 2021 International Forum of Young Scientists on Advanced Optical Manufacturing (APCOM and YSAOM 2021), 2021, Hong Kong, Hong Kong
Abstract
In the field of electronic modulation, vanadium dioxide (VO2) is a potential material owing to its function of automatic insulator-to-metal transition (MIT) which can induce rapid changes in electrical resistivity through MIT. Nevertheless, the application of modulator based on VO2 is limited by some performance shortcomings, including wide hysteresis loop width (ΔH), high phase transition temperature (Tc) as well as low phase transition amplitude (AMIT). In this work, by DC (DirectCurrent)-magnetron sputtering with doping Fe3+ into VO2 films, narrowed ΔH and decreased Tc are observed. Interestingly, the Fe doped VO2 films show ultra-high phase transition amplitude despite the low Tc due to the influence of Fe dopants. Specifically, the 0.5% Fe-doped VO2 film shows the best MIT characteristics with ultra-high phase transition amplitude of 104, narrow ΔH decreased to 9.8° and low Tc around 60.02°C, which is considered to be the first time to highly heighten the electrical MIT properties by Fe doping. In addition, we also comprehensively studied the influences of doping with Fe element on the MIT properties and microstructures based on characterization such as SEM, XRD, Raman shift and XPS results. These results show that our unique preparation method can manufacture VO2 thin films with excellent MIT properties, which will be beneficial to the popularization and publicity of VO2 based electrical modulator.
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Zihao Xiang, Zhiming Wu, Yuanlin Shi, Xiang Dong, Chunyu Li, Xuanru Chen, Jun Wang, and Yadong Jiang "Ultra-high phase transition amplitude of Fe-doped high-performance VO2 films manufactured by DC-magnetron sputtering for modulation application", Proc. SPIE 12166, Seventh Asia Pacific Conference on Optics Manufacture and 2021 International Forum of Young Scientists on Advanced Optical Manufacturing (APCOM and YSAOM 2021), 121662I (15 February 2022); https://doi.org/10.1117/12.2615477
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KEYWORDS
Iron
Doping
Vanadium
Sputter deposition
Crystals
Modulation
Manufacturing
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