Automatic characterization method for the quasi-planar freeform surface by atmospheric pressure plasma processing

Peng Ji; Duo Li; Yuan Jin; Bo Wang

doi:10.1117/12.2617519

15 February 2022 Automatic characterization method for the quasi-planar freeform surface by atmospheric pressure plasma processing

Peng Ji, Duo Li, Yuan Jin, Bo Wang

Author Affiliations +

Proceedings Volume 12166, Seventh Asia Pacific Conference on Optics Manufacture and 2021 International Forum of Young Scientists on Advanced Optical Manufacturing (APCOM and YSAOM 2021); 121665B (2022) https://doi.org/10.1117/12.2617519
Event: Seventh Asia Pacific Conference on Optics Manufacture and 2021 International Forum of Young Scientists on Advanced Optical Manufacturing (APCOM and YSAOM 2021), 2021, Hong Kong, Hong Kong

Abstract

With the vertical fluctuation of small amplitudes, the quasi-planar freeform surface is essentially a plane superposed by microstructure with several micrometers. In practical, it’s widely used to improve the optical performance. However, its form accuracy highly depends on the processing iteration with all kinds of computer controlled optical surfacing (CCOS) technology. This paper presents an automatic characterization method for the quasi-planar freeform surface by atmospheric pressure plasma processing (APPP). Firstly, the principle of APPP and fabrication of the typical quasi-planar freeform surface are introduced. Based on this, an automatic characterization method is developed to eliminate the misalignment between the measured and designed surface, which serves for the form error evaluation and removal generation of next processing step. Finally, the simulation and experiment were conducted to demonstrate the effectiveness of the proposed method, which indicates that it can provide the reliable feedback for the fabrication of quasi-planar freeform surface.

Citation Download Citation

Peng Ji, Duo Li, Yuan Jin, and Bo Wang "Automatic characterization method for the quasi-planar freeform surface by atmospheric pressure plasma processing", Proc. SPIE 12166, Seventh Asia Pacific Conference on Optics Manufacture and 2021 International Forum of Young Scientists on Advanced Optical Manufacturing (APCOM and YSAOM 2021), 121665B (15 February 2022); https://doi.org/10.1117/12.2617519

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