Multiscale modeling of femtosecond laser processing quartz crystal

Yinghao Dai; You Wang; Yun Wang; Kaiyan Luo; Yuwei Yang; Yutang Dai

doi:10.1117/12.2643612

16 December 2022 Multiscale modeling of femtosecond laser processing quartz crystal

Yinghao Dai, You Wang, Yun Wang, Kaiyan Luo, Yuwei Yang, Yutang Dai

Proceedings Volume 12312, Advanced Laser Processing and Manufacturing VI; 1231206 (2022) https://doi.org/10.1117/12.2643612
Event: SPIE/COS Photonics Asia, 2022, Online Only

Abstract

This study optimizes the distribution function of laser light intensity inside the material, based on the interaction between a femtosecond laser of 800 nm wavelength and quartz crystal, comprehensively considering the changes in absorption coefficient and reflectivity caused by material anisotropy. Throughout the simulation of multi-pulse machining, the influence of processing parameters such as the number of pulses and pulse energy on the hole depth, hole taper, and cross-sectional topography was investigated. Finally, the three-dimensional topography processed at various scanning rates was researched, and the correlation between the spot overlap ratio and the bottom surface topography was examined.

Conference Presentation

Citation Download Citation

Yinghao Dai, You Wang, Yun Wang, Kaiyan Luo, Yuwei Yang, and Yutang Dai "Multiscale modeling of femtosecond laser processing quartz crystal", Proc. SPIE 12312, Advanced Laser Processing and Manufacturing VI, 1231206 (16 December 2022); https://doi.org/10.1117/12.2643612

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