The study on dark current of InAs/GaSb superlattice longwave devices with unipolar graded barrier structure

Tianyu Cao; Youwen Huang; Junbin Li; Jincheng Kong; Xuchang Zhou; Gongrong Deng; Haipeng Wang; Qiusi Peng; Yu Ao; Yingchun Mu; Zhi Jiang; Dongsheng Li

doi:10.1117/12.2652145

20 January 2023 The study on dark current of InAs/GaSb superlattice longwave devices with unipolar graded barrier structure

Tianyu Cao, Youwen Huang, Junbin Li, Jincheng Kong, Xuchang Zhou, Gongrong Deng, Haipeng Wang, Qiusi Peng, Yu Ao, Yingchun Mu, Zhi Jiang, Dongsheng Li

Author Affiliations +

Proceedings Volume 12555, AOPC 2022: Infrared Devices and Infrared Technology; and Terahertz Technology and Applications; 125550Q (2023) https://doi.org/10.1117/12.2652145
Event: Applied Optics and Photonics China 2022 (AOPC2022), 2022, Beijing, China

Abstract

The long-wave InAs/GaSb type II superlattice graded barrier structure was grown by MBE and applied to fabricate the various area diodes. The anodic sulfidization treatment, SiO2 film deposited by inductively coupled plasma chemical vapor deposition (ICP-CVD) and ion beam deposition (IBD) were combined into three methods to passivate the diodes. The variation of dark current density and the forming mechanism as related to diode sizes and measurement temperature was characterized and analyzed. The anodic sulfidization and IBD treated diodes show the worst dark current. The two groups of diodes passivated by anodic sulfidization and ICP-CVD obtained the lowest surface leakage current 3.74×10^-5 A/cm² and 5.08×10^-5 A/cm², the maximal surface resistivity 4.48×10⁵ Ω·cm² and 9.68×10⁵ Ω·cm² respectively.

Citation Download Citation

Tianyu Cao, Youwen Huang, Junbin Li, Jincheng Kong, Xuchang Zhou, Gongrong Deng, Haipeng Wang, Qiusi Peng, Yu Ao, Yingchun Mu, Zhi Jiang, and Dongsheng Li "The study on dark current of InAs/GaSb superlattice longwave devices with unipolar graded barrier structure", Proc. SPIE 12555, AOPC 2022: Infrared Devices and Infrared Technology; and Terahertz Technology and Applications, 125550Q (20 January 2023); https://doi.org/10.1117/12.2652145

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