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Ilias Gaffarov,Jacobus M. Sturm,Ard Vlooswijk,Paul de Heij,Marcelo D. Ackermann, andIgor A. Makhotkin
"Si transfer and self-limiting chemisorption on Ru thin film surface in hydrogen radicals environment", Proc. SPIE 12578, Optics Damage and Materials Processing by EUV/X-ray Radiation (XDam8), 125780L (6 June 2023); https://doi.org/10.1117/12.2682704
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Ilias Gaffarov, Jacobus M. Sturm, Ard Vlooswijk, Paul de Heij, Marcelo D. Ackermann, Igor A. Makhotkin, "Si transfer and self-limiting chemisorption on Ru thin film surface in hydrogen radicals environment," Proc. SPIE 12578, Optics Damage and Materials Processing by EUV/X-ray Radiation (XDam8), 125780L (6 June 2023); https://doi.org/10.1117/12.2682704