Study on the method of eliminating stray light and uniform light micro-illumination based on microlens array matching DMD

Zhiqun Liu; Xiaoling Xue; Yingwu Zhou

doi:10.1117/12.2666056

4 April 2023 Study on the method of eliminating stray light and uniform light micro-illumination based on microlens array matching DMD

Zhiqun Liu, Xiaoling Xue, Yingwu Zhou

Author Affiliations +

Proceedings Volume 12617, Ninth Symposium on Novel Photoelectronic Detection Technology and Applications; 126173L (2023) https://doi.org/10.1117/12.2666056
Event: 9th Symposium on Novel Photoelectronic Detection Technology and Applications (NDTA 2022), 2022, Hefei, China

Abstract

The parallel confocal micro-measurement method based on DMD with structured light illumination has high imaging speed and can measure quickly in a wide range. However, the traditional micro-illumination technology has uneven illumination light and stray light, which affects the measurement accuracy. Therefore, based on the parallel confocal micro-imaging system of DMD structured light illumination, a micro-illumination method of eliminating stray light and uniformly illuminating is proposed in this paper, which uses microlens array to match DMD array. The simulation results show that using microlens array can improve the uniformity of micro-illumination and the utilization rate of light energy. The experimental results show that the CV value of the micro-illumination system based on microlens array is 1.47%, which is about 20 times higher than that of the traditional illumination system. The uniform light illumination system with microlens array adopts modular design, which is easy to transplant and can be applied to ordinary microscopes to improve the microscopic imaging quality.

Citation Download Citation

Zhiqun Liu, Xiaoling Xue, and Yingwu Zhou "Study on the method of eliminating stray light and uniform light micro-illumination based on microlens array matching DMD", Proc. SPIE 12617, Ninth Symposium on Novel Photoelectronic Detection Technology and Applications, 126173L (4 April 2023); https://doi.org/10.1117/12.2666056

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available

Members: $17.00

Non-members: $21.00 ADD TO CART

PROCEEDINGS
10 PAGES

DOWNLOAD PAPER SAVE TO MY LIBRARY

GET CITATION

RIGHTS & PERMISSIONS

Get copyright permission Get copyright permission on Copyright Marketplace

KEYWORDS

Microlens array

Digital micromirror devices

Design and modelling

Confocal microscopy

Stray light

Imaging systems

Light sources

Show All Keywords

Keywords/Phrases

Search In:

Publication Years