Detection of geometrical patterns of self-assembled gold nanospheres and top-down fabricated nanostructures using coherent Fourier scatterometry

Sandra Krämer; Kathrin Kroth; Thomas Sure; Peter J. Klar

doi:10.1117/12.2673843

15 August 2023 Detection of geometrical patterns of self-assembled gold nanospheres and top-down fabricated nanostructures using coherent Fourier scatterometry

Sandra Krämer, Kathrin Kroth, Thomas Sure, Peter J. Klar

Author Affiliations +

Proceedings Volume 12618, Optical Measurement Systems for Industrial Inspection XIII; 126182N (2023) https://doi.org/10.1117/12.2673843
Event: SPIE Optical Metrology, 2023, Munich, Germany

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Abstract

Detection of nanoparticles gets more and more relevant in various fields of application, e.g., semiconductor technology, medicine or biology. A fast and universal detection method of nanoparticles is essential for these leading-edge technologies. Classical imaging methods struggle with the resolution of nanoparticles smaller than the diffraction limit. Established optical near-field methods are complex and time consuming. We demonstrate that using Coherent Fourier Scatterometry can overcome most of these challenges. For this purpose, we study the optical response of gold nanosphere arrangements on silicon wafers. In particular, we examine arrays of particles arranged in geometrical structures such as lines, squares, triangles, and L-shapes. The dimensions of these structures are in the order or even smaller than the Airy diameter. Correlations between the geometry of the particle arrangement and the intensity distributions in the Fourier plane are characterized by applying different analyzing methods. Thus, it is possible to distinguish between different structures and, furthermore, to extract their geometrical orientations. In addition, gold nanostructures of defined shape, but different sample thicknesses top-down fabricated on silicon are also investigated. These nanostructure shapes studied comprise the same geometries as mentioned above as well as spirals with a diameter comparable to the spot size of the used microscope objective.

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Sandra Krämer, Kathrin Kroth, Thomas Sure, and Peter J. Klar "Detection of geometrical patterns of self-assembled gold nanospheres and top-down fabricated nanostructures using coherent Fourier scatterometry", Proc. SPIE 12618, Optical Measurement Systems for Industrial Inspection XIII, 126182N (15 August 2023); https://doi.org/10.1117/12.2673843

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