Applied ellipsometry of the surface microrelief various materials

V. S. Ayrapetyan; A. V. Makeev

doi:10.1117/12.2690089

17 October 2023 Applied ellipsometry of the surface microrelief various materials

V. S. Ayrapetyan, A. V. Makeev

Proceedings Volume 12780, 29th International Symposium on Atmospheric and Ocean Optics: Atmospheric Physics; 127800T (2023) https://doi.org/10.1117/12.2690089
Event: XXIX International Symposium "Atmospheric and Ocean Optics, Atmospheric Physics", 2023, Moscow, Russian Federation

Abstract

The paper describes a modernized optical scheme of the LEF3M-1 laser ellipsophotometer with the possibility of automatic determination of the surface microrelief of various materials in situ. Experimental results of registration and processing of ellipsometric patterns reflected from a surface with a microrelief are presented; digital processing was carried out using wavelet analysis methods.

Citation Download Citation

V. S. Ayrapetyan and A. V. Makeev "Applied ellipsometry of the surface microrelief various materials", Proc. SPIE 12780, 29th International Symposium on Atmospheric and Ocean Optics: Atmospheric Physics, 127800T (17 October 2023); https://doi.org/10.1117/12.2690089

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