Microfabrication of polyimide film by helium-free short-pulse CO2 laser

Ryo Okawa; Kazuyuki Uno; Shohei Watarai; Yasushi Kodama

doi:10.1117/12.3001366

12 March 2024 Microfabrication of polyimide film by helium-free short-pulse CO₂ laser

Ryo Okawa, Kazuyuki Uno, Shohei Watarai, Yasushi Kodama

Proceedings Volume 12873, Laser-based Micro- and Nanoprocessing XVIII; 1287315 (2024) https://doi.org/10.1117/12.3001366
Event: SPIE LASE, 2024, San Francisco, California, United States

Conference Poster

Abstract

Piercing and cutting of polyimide film were investigated by our He-free CO₂ laser excited by longitudinal pulsed discharge without pre-ionization. The samples were polyimide film with a thickness of 50 μm, 100 μm, 150 μm and 200 μm. The laser pulse was a short pulse with a tail and had a laser energy of 39.6 mJ, a spike pulse width of 384 ns, a tail length of 108 μs, and an energy ratio of the spike pulse to the pulse tail of 1:128 at a repetition rate of 200 Hz. The laser beam was circular flat-top shape. The laser beam was focused to a diameter of 508 μm, with a fluence per pulse of 19.4 J/cm². The minimum total irradiation fluence required for piercing in the film with a thickness of 200 μm was 389 J/cm². The minimum scanning speed required for cutting in the film with a thickness of 200 μm was 15 mm/s.

(2024) Published by SPIE. Downloading of the abstract is permitted for personal use only.

Citation Download Citation

Ryo Okawa, Kazuyuki Uno, Shohei Watarai, and Yasushi Kodama "Microfabrication of polyimide film by helium-free short-pulse CO₂ laser", Proc. SPIE 12873, Laser-based Micro- and Nanoprocessing XVIII, 1287315 (12 March 2024); https://doi.org/10.1117/12.3001366

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