Inspection Of Parts In Micro-Inches With A Closed Circuit Television System Or How To Measure To A Half-Millionth Of An Inch Without Hardly Trying

Lewis C. Page

doi:10.1117/12.956019

28 February 1978 Inspection Of Parts In Micro-Inches With A Closed Circuit Television System Or How To Measure To A Half-Millionth Of An Inch Without Hardly Trying

Lewis C. Page

Author Affiliations +

Proceedings Volume 0129, Effective Utilization of Optics in Quality Assurance I; (1978) https://doi.org/10.1117/12.956019
Event: Effective Utilization of Optics in Quality Assurance, 1977, Arlington Heights, United States

Abstract

A brief discussion on a unique electronic measurement system recently developed for the semi-conductor industry and other applications where materials must be fashioned in extremely small dimensions.

Citation Download Citation

Lewis C. Page "Inspection Of Parts In Micro-Inches With A Closed Circuit Television System Or How To Measure To A Half-Millionth Of An Inch Without Hardly Trying", Proc. SPIE 0129, Effective Utilization of Optics in Quality Assurance I, (28 February 1978); https://doi.org/10.1117/12.956019

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