Design and fabrication of HgCdTe linear avalanche devices with low gain normalized dark current density

Hao Xie; Huijun Guo; Chuan Shen; Liao Yang; Lu Chen; Li He

doi:10.1117/12.2687407

6 November 2023 Design and fabrication of HgCdTe linear avalanche devices with low gain normalized dark current density

Hao Xie, Huijun Guo, Chuan Shen, Liao Yang, Lu Chen, Li He

Proceedings Volume 12921, Third International Computing Imaging Conference (CITA 2023); 1292108 (2023) https://doi.org/10.1117/12.2687407
Event: Third International Computing Imaging Conference (CITA 2023), 2023, Sydney, Australia

Abstract

Mid-Wavelength Infrared (MWIR) HgCdTe electron-initiated avalanche photodiodes (e-APDs) have presented excellent performances to resolve and count photons. Aiming at low flux, the Readout Integrated Circuit (ROIC) noise can be extremely reduced by certain device gain, and very low excess noise of HgCdTe e-APDs makes opportunity for noise equivalent photon (NEPh) to be one. Therefore, the main issue for Signal-to-Noise Ratio (SNR) of HgCdTe APD is Gain Normalized Dark Current Density (GNDCD) at high reverse bias. In this work, the electric field distribution is optimized by designing the mesa device structure to suppress the tunneling current at high operating voltage. Furthermore, new combining dry/wet etching technology and passivation technology based on Plasma Atomic Enhanced Layer Deposition (PEALD) were used to reduce surface leakage current. Finally, 20 μm pitch 128×128 array HgCdTe APDs for cut-off wavelengths 4.32 μm @80K corresponding to compositions x_cd 0.326 were fabricated, the measured GNDCD of test unit is about 1.5~50×10^-9 A/cm² at 0~13V

Citation Download Citation

Hao Xie, Huijun Guo, Chuan Shen, Liao Yang, Lu Chen, and Li He "Design and fabrication of HgCdTe linear avalanche devices with low gain normalized dark current density", Proc. SPIE 12921, Third International Computing Imaging Conference (CITA 2023), 1292108 (6 November 2023); https://doi.org/10.1117/12.2687407

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KEYWORDS

Mercury cadmium telluride

Dark current

Signal to noise ratio

Avalanche photodetectors

Fabrication

Passivation

Design and modelling

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