Static and dynamic analysis of electrostatically driven graphene  nanomechanical drum resonators based on finite element models

Ce Zhang; YvBin Zhang; Chen Yang; Fengnan Chen; Heng Lu; Ying Yan; Joel Moser

doi:10.1117/12.2688193

6 November 2023 Static and dynamic analysis of electrostatically driven graphene nanomechanical drum resonators based on finite element models

Ce Zhang, YvBin Zhang, Chen Yang, Fengnan Chen, Heng Lu, Ying Yan, Joel Moser

Author Affiliations +

Proceedings Volume 12921, Third International Computing Imaging Conference (CITA 2023); 1292116 (2023) https://doi.org/10.1117/12.2688193
Event: Third International Computing Imaging Conference (CITA 2023), 2023, Sydney, Australia

Abstract

Free-standing graphene membranes are the archetypes of two-dimensional nanomechanical resonators. Because of their small size, ultra-low mass, and high elastic modulus, these resonators typically vibrate at frequencies ranging from a few megahertz to a few hundreds of megahertz, and their resonant frequencies can be widely tuned by electrical means. However, because of fabrication subtleties, it has been found that actual resonant frequencies and mode shapes vary greatly from device to device. To address it, here we simulate graphene nanomechanical drum resonators with COMSOL Multiphysics finite element software. We investigate the static and dynamic characteristics of the resonator in detail. In the static case, we analyze the bent shape of the graphene membrane induced by a static gate voltage for different sizes of a local gate electrode. In the dynamic case, we simulate the influence of device geometry and built-in strain on the resonant frequency of the first vibrational mode and on its tunability. Further, because folds may form in the membrane during exfoliation and transfer to the substrate, we investigate how this imperfection affects resonant frequencies and mode shapes. To this end, we introduce a nonuniform tension along a line in our finite element model. Our study may offer guidelines to design graphene resonators, with applications in components for radio frequency signal processing and communications and for nanomechanical sensing.

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Ce Zhang, YvBin Zhang, Chen Yang, Fengnan Chen, Heng Lu, Ying Yan, and Joel Moser "Static and dynamic analysis of electrostatically driven graphene nanomechanical drum resonators based on finite element models", Proc. SPIE 12921, Third International Computing Imaging Conference (CITA 2023), 1292116 (6 November 2023); https://doi.org/10.1117/12.2688193

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KEYWORDS

Graphene

Resonators

Mode shapes

Finite element methods

Electrodes

3D modeling

Sensors

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