Study on a charging control method with a high current and large field of view

N. Terao; T. Yokosuka; H. Kotsuji; K. Shiraishi; H. Kawano

doi:10.1117/12.3007173

9 April 2024 Study on a charging control method with a high current and large field of view

N. Terao, T. Yokosuka, H. Kotsuji, K. Shiraishi, H. Kawano

Proceedings Volume 12955, Metrology, Inspection, and Process Control XXXVIII; 1295520 (2024) https://doi.org/10.1117/12.3007173
Event: SPIE Advanced Lithography + Patterning, 2024, San Jose, California, United States

Conference Poster

Abstract

Scanning electron microscopes for semiconductor device inspection require high-throughput performance for full-wafer inspections. To achieve high-throughput inspections, we need to inspect a large field of view (FOV) with a high current. However, these inspection conditions cause the sample to experience electrical charging. This sample charging causes abnormal contrast and image distortions. In this paper, we show that the sample charging can be controlled by the irradiation current, and image distortion can also be minimized. We also show that the sample charging can be controlled by the voltage applied to the sample, and we explain the mechanism of charge formation.

(2024) Published by SPIE. Downloading of the abstract is permitted for personal use only.

Citation Download Citation

N. Terao, T. Yokosuka, H. Kotsuji, K. Shiraishi, and H. Kawano "Study on a charging control method with a high current and large field of view", Proc. SPIE 12955, Metrology, Inspection, and Process Control XXXVIII, 1295520 (9 April 2024); https://doi.org/10.1117/12.3007173

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available