A white light interferometry stitching measurement method based on feature extraction

Junren Chen; Shanyong Chen; Weiwei Chen; Junfeng Liu

doi:10.1117/12.3009483

29 December 2023 A white light interferometry stitching measurement method based on feature extraction

Junren Chen, Shanyong Chen, Weiwei Chen, Junfeng Liu

Author Affiliations +

Proceedings Volume 12976, Eighth Asia Pacific Conference on Optics Manufacture and Third International Forum of Young Scientists on Advanced Optical Manufacturing (APCOM and YSAOM 2023); 129761P (2023) https://doi.org/10.1117/12.3009483
Event: 8th Asia Pacific Conference on Optics Manufacture & 3rd International Forum of Young Scientists on Advanced Optical Manufacturing, 2023, Shenzhen, China

Abstract

The white light interferometry technique can measure the three-dimensional topography of ultra-precise complex surface with sub-nanometer resolution and precision, and has been widely concerned by academia and industry since it was proposed. The measurement range of white light interferometry technology is usually limited by the size of the optical field of view of the system, and the surface of the measured object can only be measured within the limited range of the camera's single imaging. In order to obtain the microscopic surface topography with a larger field of view, it is usually necessary to conduct stitching measurement. In this paper, a measurement method of aperture stitching of white light interferometry based on feature extraction is presented. The first step is subaperture partitioning and data preprocessing. The second step is feature extraction. The feature points are extracted by the Speeded-Up Robust Features (SURF) algorithm. The third step is to identify and filter wrong match points in the feature extraction algorithm using the Random Sample Consensus (RANSAC) algorithm. The fourth step is to use the improved Iterative Closest Point (ICP) algorithm to accurately register the point cloud, and perform data fusion in the overlapping region to complete the reconstruction of the microscopic three-dimensional surface topography. This method is used to measure the microstructure of quartz vibratory beam accelerometer. The experimental results show that the proposed algorithm has a faster speed than the traditional algorithm while maintaining high precision.

(2023) Published by SPIE. Downloading of the abstract is permitted for personal use only.

Citation Download Citation

Junren Chen, Shanyong Chen, Weiwei Chen, and Junfeng Liu "A white light interferometry stitching measurement method based on feature extraction", Proc. SPIE 12976, Eighth Asia Pacific Conference on Optics Manufacture and Third International Forum of Young Scientists on Advanced Optical Manufacturing (APCOM and YSAOM 2023), 129761P (29 December 2023); https://doi.org/10.1117/12.3009483

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KEYWORDS

Feature extraction

3D image processing

Optical interferometry

Image registration

Interferometers

Image processing

Reconstruction algorithms

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