Dielectric silicon slot-waveguides for far-infrared THz-spectroscopy

Lisa Schmitt; Kristof Dausien; Marcel Burfeindt; Jan Barowski; Martin Hoffmann

doi:10.1117/12.3017547

18 June 2024 Dielectric silicon slot-waveguides for far-infrared THz-spectroscopy

Lisa Schmitt, Kristof Dausien, Marcel Burfeindt, Jan Barowski, Martin Hoffmann

Proceedings Volume 12994, Terahertz Photonics III; 129940C (2024) https://doi.org/10.1117/12.3017547
Event: SPIE Photonics Europe, 2024, Strasbourg, France

Abstract

We present the design and characterization of dielectric slot waveguides fabricated in highly resistive silicon for operation in the THz frequency range. We designed rib and slot waveguides with straight and curved beams using the mode solvers from BeamPROP and CST Studio Suite. The transmission parameters of the free space measurement is about -30 dB. Using the slot waveguide, the transmission is about -15 dB demonstrating the ability to guide fields in our structures. At 300 GHz, the measured losses are in the range of 0.15 dB/mm. Solvents are injected into the slot of the waveguide by capillary force changing the transmission. Each solvent realizes a different change in transmission, so that we aim to use the slot waveguides for THz spectroscopy in future.

Conference Presentation

(2024) Published by SPIE. Downloading of the abstract is permitted for personal use only.

Citation Download Citation

Lisa Schmitt, Kristof Dausien, Marcel Burfeindt, Jan Barowski, and Martin Hoffmann "Dielectric silicon slot-waveguides for far-infrared THz-spectroscopy", Proc. SPIE 12994, Terahertz Photonics III, 129940C (18 June 2024); https://doi.org/10.1117/12.3017547

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