Three-dimensional reconstruction method by Fourier spectrum analysis-based white light interference scanning

Weiwei Chen; Shanyong Chen; Yupeng Xiong; Junfeng Liu

doi:10.1117/12.3018867

30 April 2024 Three-dimensional reconstruction method by Fourier spectrum analysis-based white light interference scanning

Weiwei Chen, Shanyong Chen, Yupeng Xiong, Junfeng Liu

Author Affiliations +

Proceedings Volume 13156, Sixth Conference on Frontiers in Optical Imaging and Technology: Imaging Detection and Target Recognition; 131561F (2024) https://doi.org/10.1117/12.3018867
Event: Sixth Conference on Frontiers in Optical Imaging Technology and Applications (FOI2023), 2023, Nanjing, JS, China

Abstract

In the three-dimensional(3-D) microscopic measurement based on white light interference imaging, due to the influence of external environment interference and the phase-shifting step size of micro-shifter, the sampling signal by longitudinal scanning may have the problem of "peak leakage", which seriously affects the accuracy of measurement results. In this paper, by analyzing the spectrum of interference signal, a method for extracting zero optical path difference(OPD) position based on multinomial Gaussian fitting for envelope curve of filtered time domain signal is proposed. Finally, based on the method proposed in this paper and ZYGO commercial interferometer, the comparative measurement experiment of standard steps is carried out. The simulation and experimental results show that the method has good robustness and effectiveness.

(2024) Published by SPIE. Downloading of the abstract is permitted for personal use only.

Citation Download Citation

Weiwei Chen, Shanyong Chen, Yupeng Xiong, and Junfeng Liu "Three-dimensional reconstruction method by Fourier spectrum analysis-based white light interference scanning", Proc. SPIE 13156, Sixth Conference on Frontiers in Optical Imaging and Technology: Imaging Detection and Target Recognition, 131561F (30 April 2024); https://doi.org/10.1117/12.3018867

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