Research on the preparation of flexible ZnO blind photodetectors

Songqi Zhao; Dayong Jiang; Man Zhao; Haoda Li; Hepeng Zhao; Shuangyu Wang; Hongshang Han

doi:10.1117/12.3033892

5 July 2024 Research on the preparation of flexible ZnO blind photodetectors

Songqi Zhao, Dayong Jiang, Man Zhao, Haoda Li, Hepeng Zhao, Shuangyu Wang, Hongshang Han

Author Affiliations +

Proceedings Volume 13183, International Conference on Optoelectronic Information and Functional Materials (OIFM 2024); 1318325 (2024) https://doi.org/10.1117/12.3033892
Event: The 3rd International Conference on Optoelectronic Information and Functional Materials (OIFM 2024), 2024, Wuhan, China

Abstract

Flexible zinc oxide (ZnO) photodetectors have attracted widespread attention due to their advantages such as light weight, good flexibility, good photoelectric performance, and flexible preparation processes. This study successfully prepared high-quality ZnO thin films on polyethylene terephthalate (PET) flexible substrates using magnetron sputtering method, and completed the preparation of photodetectors by evaporating silver electrodes on the surface of the thin films. Afterwards, we tested and characterized the photoelectric performance of the prepared detector, and the results showed that the detector has good photoresponse characteristics and stable photocurrent output. The preparation of this detector on a flexible substrate provides strong support for its applications in wearable electronics, flexible displays, and other fields. This study provides valuable insights for the future development and utilization of flexible ZnO photodetectors.

(2024) Published by SPIE. Downloading of the abstract is permitted for personal use only.

Citation Download Citation

Songqi Zhao, Dayong Jiang, Man Zhao, Haoda Li, Hepeng Zhao, Shuangyu Wang, and Hongshang Han "Research on the preparation of flexible ZnO blind photodetectors", Proc. SPIE 13183, International Conference on Optoelectronic Information and Functional Materials (OIFM 2024), 1318325 (5 July 2024); https://doi.org/10.1117/12.3033892

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KEYWORDS

Zinc oxide

Photodetectors

Thin films

Ultraviolet radiation

Sensors

Electrodes

Sputter deposition

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