Reducing mask process correction time with hybrid rule-based and model-based solution

Xuan Zhu; Chia-Wei Chang; Yongming Wen; Ao Chen; Yu Zhu

doi:10.1117/12.3034092

20 November 2024 Reducing mask process correction time with hybrid rule-based and model-based solution

Xuan Zhu, Chia-Wei Chang, Yongming Wen, Ao Chen, Yu Zhu

Author Affiliations +

Proceedings Volume 13216, Photomask Technology 2024; 1321624 (2024) https://doi.org/10.1117/12.3034092
Event: SPIE Photomask Technology + EUV Lithography, 2024, Monterey, California, United States

Conference Poster

Abstract

Model-based Mask Process Correction (MPC) is an effective method to ensure mask pattern fidelity, enhance mask feature resolution and improve mask Critical Dimension (CD) uniformity at advanced mask technology nodes. However, implementation of model-based MPC typically involves long cycle time of mask manufacturing. Rule-based MPC, on the other hand, has an advantage in the cycle time, but the accuracy normally cannot meet the specification. Therefore, improving MPC runtime without tolerating the accuracy is highly desired in the mask making process. A hybrid ruled-based and model-based MPC solution is introduced in this paper, which is aimed to maintain mask CD accuracy with reduced runtime. In this flow, a bias rule table is first automatically generated from a calibrated MPC model. The edges of the MPC target are then moved based on the rule table. The model-based MPC step is finally applied starting from the pre-moved edges, which gives fast convergence with minimum number of iterations. The mask correction accuracy and cycle time of this hybrid MPC flow is compared with full model-based MPC flow in detail.

(2024) Published by SPIE. Downloading of the abstract is permitted for personal use only.

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Xuan Zhu, Chia-Wei Chang, Yongming Wen, Ao Chen, and Yu Zhu "Reducing mask process correction time with hybrid rule-based and model-based solution", Proc. SPIE 13216, Photomask Technology 2024, 1321624 (20 November 2024); https://doi.org/10.1117/12.3034092

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