A fiber-optic Fabry-Perot pressure sensor based on HTCC

Fuqiang Sun; Xiangcong Xu; Huiyi Tang; Yuchen Xiao; Ling Sun; Peng Zhang; Xiaohua Lei; Xianming Liu

doi:10.1117/12.3040108

16 August 2024 A fiber-optic Fabry-Perot pressure sensor based on HTCC

Fuqiang Sun, Xiangcong Xu, Huiyi Tang, Yuchen Xiao, Ling Sun, Peng Zhang, Xiaohua Lei, Xianming Liu

Proceedings Volume 13231, 4th International Conference on Laser, Optics, and Optoelectronic Technology (LOPET 2024); 132311E (2024) https://doi.org/10.1117/12.3040108
Event: 4th International Conference on Laser, Optics, and Optoelectronic Technology (LOPET 2024), 2024, Chongqing, China

Abstract

In the aerospace, military industry and energy sectors, there is a growing demand for dynamic pressure measurement in high-temperature environments. At present, common electrical pressure sensors are difficult to meet the requirements of high temperature and high frequency response at the same time. Combining the characteristics of high temperature cofired ceramics (HTCC) and the structure of fiber optic Fabry-Perot sensor, this paper proposes a realization method of fiber optic Fabry-Perot pressure sensors based on HTCC and high-temperature sintering technology. Based on the theoretical analysis of HTCC materials, a high-temperature resistant pressure sensing film based on HTCC was designed and fabricated. The ceramic sintering process is further used to package and integrate HTCC sensor. The specific experimental results are as follows. Static pressure sensitivity is 1.80 nm/MPa. The goodness of fit linearity reached 0.9998. The resonant frequency of the sensor reaches 495.8 kHz. The survival time at high temperature of 800 °C is more than 80 h. The sensitivity to temperature is 0.0046 nm/℃. The sensor studied is suitable for dynamic pressure measurement in high temperature environment.

(2024) Published by SPIE. Downloading of the abstract is permitted for personal use only.

Citation Download Citation

Fuqiang Sun, Xiangcong Xu, Huiyi Tang, Yuchen Xiao, Ling Sun, Peng Zhang, Xiaohua Lei, and Xianming Liu "A fiber-optic Fabry-Perot pressure sensor based on HTCC", Proc. SPIE 13231, 4th International Conference on Laser, Optics, and Optoelectronic Technology (LOPET 2024), 132311E (16 August 2024); https://doi.org/10.1117/12.3040108

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KEYWORDS

Sensors

Fiber optics sensors

Fabry Perot interferometers

Fiber optics

Ceramics

Sintering

Optical fibers

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