Development and performance of a diamond-film polishing apparatus with hot metals

Masanori Yoshikawa

doi:10.1117/12.22460

1 December 1990 Development and performance of a diamond-film polishing apparatus with hot metals

Masanori Yoshikawa

Proceedings Volume 1325, Diamond Optics III; (1990) https://doi.org/10.1117/12.22460
Event: 34th Annual International Technical Symposium on Optical and Optoelectronic Applied Science and Engineering, 1990, San Diego, CA, United States

Abstract

The diamond film polishing apparatus with hot metals has been presented . Diamond films deposited by both microwave plasma CVD and arc discharge plasma jet CVD are used as workpieces . As a diamond film sways on a polishing plate made of an iron or a nickel heated to 75O''95O C it is finished to flat and glass-like surfaces without any exfoliation. Not only swaying speed but also polishing pressure in this apparatus are extremely low in comparison to a conventional mechanical polishing method. When a cast iron and a molybdenum are used as a polishing plate polishing is not advanced . The polishing rate is highest in a vacuum atmosphere . Among gas atmospheres the rate is highes t in a hydrogen atmosphere . These result show that a diamond film is polished by the diffusion of carbon into a polishing plate. When a diamond film surface is too rough to polish by this apparatus the surface planing with YAG laser is applied then polishing is conducted on the planed surface. 1 .

Citation Download Citation

Masanori Yoshikawa "Development and performance of a diamond-film polishing apparatus with hot metals", Proc. SPIE 1325, Diamond Optics III, (1 December 1990); https://doi.org/10.1117/12.22460

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