Structural and epsilon-near-zero characteristics of titanium carbide films with different carbon content

Guangxiao Hu; Zhaotan Jiang; Zhi Wang

doi:10.1117/12.3032114

10 October 2024 Structural and epsilon-near-zero characteristics of titanium carbide films with different carbon content

Guangxiao Hu, Zhaotan Jiang, Zhi Wang

Author Affiliations +

Proceedings Volume 13278, Seventh Global Intelligent Industry Conference (GIIC 2024); 1327807 (2024) https://doi.org/10.1117/12.3032114
Event: Seventh Global Intelligent Industry Conference (GIIC 2024), 2024, Shenzhen, China

Abstract

The face-centered cubic (Fcc) structured TiC_x films with different C content were prepared by reactive magnetron sputtering deposition. The influence of carbon content on the TiC_x crystal structure and dielectric properties were studied. All the films are fcc structured with (111) and (200) preferential orientation. Additionally, a tunable dual epsilon-near-zero characteristic is exhibited in visible and near infrared region. With C content increasing, the screened plasma frequency decreases. The calculated electronic states shows that atom vacancy is the main defect type underlying the optical response, while Ti antisites, Ti interstitials, Ti dumbbells or Ti interstitials may be the main factors influencing the crystal structure.

(2024) Published by SPIE. Downloading of the abstract is permitted for personal use only.

Citation Download Citation

Guangxiao Hu, Zhaotan Jiang, and Zhi Wang "Structural and epsilon-near-zero characteristics of titanium carbide films with different carbon content", Proc. SPIE 13278, Seventh Global Intelligent Industry Conference (GIIC 2024), 1327807 (10 October 2024); https://doi.org/10.1117/12.3032114

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