Heterogeneous integration of thin-film lithium niobate and silicon photonics via micro-transfer printing

Ying Tan; Shengpu Niu; Tom Vanackere; Maximilien Billet; Margot Niels; Nishant Singh; Joris Van Kerrebrouck; Kai-Wen Chen; Gunther Roelkens; Bart Kuyken; Dries Van Thourhout

doi:10.1117/12.3048730

5 December 2024 Heterogeneous integration of thin-film lithium niobate and silicon photonics via micro-transfer printing

Ying Tan, Shengpu Niu, Tom Vanackere, Maximilien Billet, Margot Niels, Nishant Singh, Joris Van Kerrebrouck, Kai-Wen Chen, Gunther Roelkens, Bart Kuyken, Dries Van Thourhout

Author Affiliations +

Proceedings Volume 13418, Fifteenth International Conference on Information Optics and Photonics (CIOP 2024); 134183G (2024) https://doi.org/10.1117/12.3048730
Event: 15th International Conference on Information Optics and Photonics (CIOP2024), 2024, Xi’an, China

Abstract

Micro-transfer printing of thin-film lithium niobate (TFLN), as a backend integration method, enables selective and localized placement of TFLN to silicon platform, facilitating the creation of complex, multi-material systems that combine lithium niobate with other components. In this study, we investigate the transfer printing technique for TFLN. We present experimental results from hybrid silicon-LN devices created using this method, including micro-transfer printed ring modulators, photonics crystal (PhC) modulators, and Bragg Grating modulators, among others.

(2024) Published by SPIE. Downloading of the abstract is permitted for personal use only.

Citation Download Citation

Ying Tan, Shengpu Niu, Tom Vanackere, Maximilien Billet, Margot Niels, Nishant Singh, Joris Van Kerrebrouck, Kai-Wen Chen, Gunther Roelkens, Bart Kuyken, and Dries Van Thourhout "Heterogeneous integration of thin-film lithium niobate and silicon photonics via micro-transfer printing", Proc. SPIE 13418, Fifteenth International Conference on Information Optics and Photonics (CIOP 2024), 134183G (5 December 2024); https://doi.org/10.1117/12.3048730

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