Measurement of surface form of freeform optics using non-contact multiwavelength interferometry

Jayesh A. Navare; Neil Fitzgibbon; Gabrielle Le Doeuff

doi:10.1117/12.3034292

31 December 2024 Measurement of surface form of freeform optics using non-contact multiwavelength interferometry

Jayesh A. Navare, Neil Fitzgibbon, Gabrielle Le Doeuff

Author Affiliations +

Proceedings Volume 13487, Optics and Photonics International Congress 2024; 134870Q (2024) https://doi.org/10.1117/12.3034292
Event: Optics and Photonics International Congress, 2024, Yokohama, Japan

Abstract

This paper investigates the feasibility of measuring surface form of freeform optics using non-contact multiwavelength interferometry. A bi-conic lens, which is one of the most fundamental freeform optics, was measured on a non-contact multiwavelength interferometer. This lens was characterized by two infinite (flat) radii of curvature along x- and ydirection and two aspheric terms along each direction. Peak-to-valley (PV), root mean square (RMS), and radius of curvature (RoC) parameters were evaluated to characterize the surface form of this lens. To evaluate the measurement repeatability, 5 consecutive measurements were performed on this lens, and it was observed that the standard deviation (3) of PV and RMS was around 29.3 nm and 3.8 nm respectively.

Citation Download Citation

Jayesh A. Navare, Neil Fitzgibbon, and Gabrielle Le Doeuff "Measurement of surface form of freeform optics using non-contact multiwavelength interferometry", Proc. SPIE 13487, Optics and Photonics International Congress 2024, 134870Q (31 December 2024); https://doi.org/10.1117/12.3034292

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