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13 December 2024 Scalable fabrication techniques for high-performance chalcogenide integrated photonic devices
Kunhao Lei, Maoliang Wei, Kangjian Bao, Kai Xu, Lan Li, Hongtao Lin
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Proceedings Volume 13499, AOPC 2024: Optical Devices and Integration; 134990C (2024) https://doi.org/10.1117/12.3045710
Event: Applied Optics and Photonics China 2024 (AOPC2024), 2024, Beijing, China
Abstract
Currently, integrated optoelectronic technology has made significant progress in commercial applications. However, existing technologies are approaching their theoretical limits. How to introduce new materials to achieve novel on-chip optical field control and generate disruptive breakthroughs will be crucial for meeting the future demands of optical computing, optical communication, optical sensing, and other applications. Chalcogenide materials, also known as chalcogenide glass materials, mainly refer to compounds containing sulfur, selenium, tellurium, and other chalcogen elements. They not only possess excellent nonlinear optical properties and excellent micro-nano processing characteristics but also some specific compositions of chalcogenide glass exhibit nonvolatile phase transition characteristics for exploring nonvolatile reconfigurable photon platforms. This paper will mainly introduce some progress in our research on scalable fabrication techniques for integrated photonic devices based on chalcogenide materials.
(2024) Published by SPIE. Downloading of the abstract is permitted for personal use only.
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Kunhao Lei, Maoliang Wei, Kangjian Bao, Kai Xu, Lan Li, and Hongtao Lin "Scalable fabrication techniques for high-performance chalcogenide integrated photonic devices", Proc. SPIE 13499, AOPC 2024: Optical Devices and Integration, 134990C (13 December 2024); https://doi.org/10.1117/12.3045710
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KEYWORDS
Chalcogenide glass
Integrated photonics
Back end of line
Silicon photonics
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