Laser-induced damage to silicon photosensor arrays

Chen-Zhi Zhang

doi:10.1117/12.2294421

1 November 1990 Laser-induced damage to silicon photosensor arrays

Chen-Zhi Zhang

Proceedings Volume 1438, Laser-Induced Damage in Optical Materials 1989; 14380C (1990) https://doi.org/10.1117/12.2294421
Event: Laser-Induced Damage in Optical Materials 1989, 1989, Boulder, CO, United States

Abstract

Laser-induced damage in two types of silicon photosensor array has been studied. The samples were MOS CCD time delay integration (TDI) sensors with a 2048x96 element array of pixels and CID photodiode arrays of 512x1 pixels. The laser source was a Q-switched 1064 nm Nd:YAG laser (10 Hz rep rate, 10 ns pulses with a 250 Ã‚Âµm spot radius). Tests for morphological and electrical damage to the CCD arrays have been reported previously. In new experiments, the micro-damage morphology is examined and correlated with both the observed electrical degradation and newly observed stress effects. We report the observation of surface deformation and lattice defects due to laser-induced stresses in the SiO2 and poly-silicon thin films on the silicon substrate. Measurements of damage for the CID arrays show them to be more resistant to laser damage than MOS structures such as CCD arrays. In addition, electrical degradation of these arrays was observed which affected the video output signal from the devices.

Citation Download Citation

Chen-Zhi Zhang "Laser-induced damage to silicon photosensor arrays", Proc. SPIE 1438, Laser-Induced Damage in Optical Materials 1989, 14380C (1 November 1990); https://doi.org/10.1117/12.2294421

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available