Resist tracking: a lithographic diagnostic tool

Clifford H. Takemoto; David H. Ziger; William Connor; Romelia G. Distasio

doi:10.1117/12.44435

1 July 1991 Resist tracking: a lithographic diagnostic tool

Clifford H. Takemoto, David H. Ziger, William Connor, Romelia G. Distasio

Author Affiliations +

Proceedings Volume 1464, Integrated Circuit Metrology, Inspection, and Process Control V; (1991) https://doi.org/10.1117/12.44435
Event: Microlithography, 1991, San Jose, CA, United States

Abstract

A novel statistically designed tracking technique is described which utilizes multiple exposure systems and photoresists to decompose tool, material, and process contributions to variation in lithography. The application of this technique is described as a means of characterizing an overall lithography process. In one application, the primary source of variation in the photo process was attributed to resists and resist processes rather than related to exposure tool. Process variation in one resist system was tracked unambiguously to changes in developer normality. Finally, results from this work extended previous studies showing that open frame exposure measurements are sensitive measures of photoresist process variation for both conventional and chemically amplified resists.

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Clifford H. Takemoto, David H. Ziger, William Connor, and Romelia G. Distasio "Resist tracking: a lithographic diagnostic tool", Proc. SPIE 1464, Integrated Circuit Metrology, Inspection, and Process Control V, (1 July 1991); https://doi.org/10.1117/12.44435

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