Submicron thin-film mom-diodes for the detection of 10 pm infrared laser radiation

I. Wilke

doi:10.1117/12.2301532

1 December 1990 Submicron thin-film MOM-diodes for the detection of 10 μm infrared laser radiation

I. Wilke

Proceedings Volume 1514, 15th International Conference on Infrared and Millimeter Waves; 15143E (1990) https://doi.org/10.1117/12.2301532
Event: 15th International Conference on Infrared and Millimeter Waves, 1990, Orlando, FL, United States

Abstract

We manufacture thin-film Ni-NiO-Ni diodes for detection of 10 μm C0₂-laser radiation with the aid of electron and UV lithography as well as sputtering techniques. Minimum strip width is ≤ 0.35 μm, NiO thickness 50 Å and measured coupling factor ≥ 130.

Citation Download Citation

I. Wilke "Submicron thin-film MOM-diodes for the detection of 10 μm infrared laser radiation", Proc. SPIE 1514, 15th International Conference on Infrared and Millimeter Waves, 15143E (1 December 1990); https://doi.org/10.1117/12.2301532

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