Optical properties of some ion-assisted deposited oxides

F. Andreani; S. Luridiana; Shuzheng Mao

doi:10.1117/12.47303

1 November 1991 Optical properties of some ion-assisted deposited oxides

F. Andreani, S. Luridiana, Shuzheng Mao

Proceedings Volume 1519, International Conference on Thin Film Physics and Applications; (1991) https://doi.org/10.1117/12.47303
Event: International Conference on Thin Film Physics and Applications, 1991, Shanghai, China

Abstract

The refractive index of several high index oxide films obtained with ion assisted deposition (IAD) is studied as a function of some ion bombardment parameters. The oxygen/metal ratio of the films obtained with one material (Ta₂O₅) is also studied. All experiments have been performed on a commercially available large scale production machine.

Citation Download Citation

F. Andreani, S. Luridiana, and Shuzheng Mao "Optical properties of some ion-assisted deposited oxides", Proc. SPIE 1519, International Conference on Thin Film Physics and Applications, (1 November 1991); https://doi.org/10.1117/12.47303

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