Ellipsometric measurement of far-infrared optical constants

Karl-Ludwig Barth

doi:10.1117/12.2297728

1 October 1991 Ellipsometric measurement of far-infrared optical constants

Karl-Ludwig Barth

Author Affiliations +

Proceedings Volume 1576, 16th International Conference on Infrared and Millimeter Waves; 15760F (1991) https://doi.org/10.1117/12.2297728
Event: 16th International Conference on Infrared and Millimeter Waves, 1991, Lausanne, Switzerland

Abstract

Ellipsometry is based on exploiting the polarization transformation that occurs as a beam of polarized light is reflected from or transmitted through an interface or film. With this method optical constants can be determined very fast, very precisely and without further assumptions (no Kramers-Kronig analysis). We have developed a rotating analyzer ellipsometer for the far-infrared wavelength range from 30 to 1200 μm. Applications are in the characterization of semiconductors and also, together with a cryogenic reflection unit, of high-T_c superconductors.

Citation Download Citation

Karl-Ludwig Barth "Ellipsometric measurement of far-infrared optical constants", Proc. SPIE 1576, 16th International Conference on Infrared and Millimeter Waves, 15760F (1 October 1991); https://doi.org/10.1117/12.2297728

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

;

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE