New kind of scanning device of low mechanical vibration noises in confocal scanning optical microscope

Zhang Shen; ChunKan Tao

doi:10.1117/12.56829

1 February 1992 New kind of scanning device of low mechanical vibration noises in confocal scanning optical microscope

Zhang Shen, ChunKan Tao

Proceedings Volume 1619, Vibration Control in Microelectronics, Optics, and Metrology; (1992) https://doi.org/10.1117/12.56829
Event: SPIE Technical: OPTCON '91, 1991, San Jose, CA, United States

Abstract

In object scanning confocal microscopes the mechanical noises caused by the step motors have some effects on quality of image. This paper analyzes the mechanical noises and puts forward a new kind of system which isolates the vibration source from the scanning plate so as to minimize mechanical noises. The paper also gives some experiment results.

Citation Download Citation

Zhang Shen and ChunKan Tao "New kind of scanning device of low mechanical vibration noises in confocal scanning optical microscope", Proc. SPIE 1619, Vibration Control in Microelectronics, Optics, and Metrology, (1 February 1992); https://doi.org/10.1117/12.56829

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