Paper
1 May 1992 Solid state direct-drive circuit for pumping gas lasers
Koichi Yasuoka, I. Satoh, Akira Ishii, Kaysuya Okamura, Tohru Tamagawa, Iwao Ohshima, T. Gotoh, Kiyoshi Yatsui
Author Affiliations +
Proceedings Volume 1628, Intense Laser Beams; (1992) https://doi.org/10.1117/12.59002
Event: OE/LASE '92, 1992, Los Angeles, CA, United States
Abstract
A solid-state excitation circuit is demonstrated without any compression circuits. The new circuit contains the dc pre-charging capacitors and pulsed charging capacitors. The applied voltage between the electrode is the sum of the pre-charging voltage and the pulsed charging voltage. Therefore, the switching voltage is lowered when increasing the pre-charging voltage. In TEA-CO2 laser device, the stable discharge is excited by using only one thyristor device. In this circuit, the breakdown voltage is lower and output efficiency is higher than that obtained in the ordinary charge-transfer circuit. The high-repetition rate operation is tested up to 1 kpps. This circuit is also available for the excitation of KrF excimer laser.
© (1992) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Koichi Yasuoka, I. Satoh, Akira Ishii, Kaysuya Okamura, Tohru Tamagawa, Iwao Ohshima, T. Gotoh, and Kiyoshi Yatsui "Solid state direct-drive circuit for pumping gas lasers", Proc. SPIE 1628, Intense Laser Beams, (1 May 1992); https://doi.org/10.1117/12.59002
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KEYWORDS
Capacitors

Excimer lasers

Cadmium

Switching

Electrons

Energy efficiency

Solid state electronics

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