Deep traps at MOCVD GaAs and regrown AlxGa1-xAs interfaces

Graciela R. Guel; Kevin J. Malloy; Christian F. Schaus; Michael Sun; Eric A. Armour; Kang Zheng; T. H. Shiau

doi:10.1117/12.59158

26 June 1992 Deep traps at MOCVD GaAs and regrown AlxGa1-xAs interfaces

Graciela R. Guel, Kevin J. Malloy, Christian F. Schaus, Michael Sun, Eric A. Armour, Kang Zheng, T. H. Shiau

Proceedings Volume 1634, Laser Diode Technology and Applications IV; (1992) https://doi.org/10.1117/12.59158
Event: OE/LASE '92, 1992, Los Angeles, CA, United States

Abstract

Deep level transient spectroscopy (DLTS) of deep levels occurring at MOCVD grown and regrown interfaces is described as a function of surface preparation. We examine two types of interfaces: 1 ) nGaAs grown on SI-GaAs and 2) A10,1Ga0,9As regrowth on Alo.lGao,9As. Surface preparation includes both shallow and deep wet etching, passivation with (NH)2S, and in-situ heat treatments and HCL etching. A new electron trap with EcEa 0.1 1 eV and 1019 cm2 and a new minority carrier trap with Ea E 0.18 eV and 10-15 cm2 were found in GaAs samples. The minority carrier trap is related to sulphur passivation. Four traps were found in the AlGai..As regrown samples. It is demonstrated that (NH)2S passivation before MOCVD improves interface quality for both the GaAs and Al1Ga0,9As grown and regrown layers.

Citation Download Citation

Graciela R. Guel, Kevin J. Malloy, Christian F. Schaus, Michael Sun, Eric A. Armour, Kang Zheng, and T. H. Shiau "Deep traps at MOCVD GaAs and regrown AlxGa1-xAs interfaces", Proc. SPIE 1634, Laser Diode Technology and Applications IV, (26 June 1992); https://doi.org/10.1117/12.59158

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available