New method for achieving accurate thickness control for uniform and graded multilayer coatings on large flat substrates

George Gutman; John E. Keem; Kevin Parker; James L. Wood; Richard N. Watts; Charles Tarrio

doi:10.1117/12.140602

21 January 1993 New method for achieving accurate thickness control for uniform and graded multilayer coatings on large flat substrates

George Gutman, John E. Keem, Kevin Parker, James L. Wood, Richard N. Watts, Charles Tarrio

Author Affiliations +

Proceedings Volume 1742, Multilayer and Grazing Incidence X-Ray/EUV Optics for Astronomy and Projection Lithography; (1993) https://doi.org/10.1117/12.140602
Event: San Diego '92, 1992, San Diego, CA, United States

Abstract

High performance in normal incidence soft X-ray optical systems requires accurate control of the d-spacing across the surface of each mirror in the system. As a first step towards being able to fabricate any desired d-spacing variation, we demonstrate the ability to produce large (25 x 150 mm) flat Mo/Si multilayer coated mirrors with a d-spacing uniformity of +/- 0.4 percent. Instead of applying the approach most often taken to minimize the d-spacing variation physical shielding of the deposition source, we use a mask with a corrected profile positioned just in front of the rotating substrate to compensate for the nonuniform deposition flux. Results obtained from hard (lambda = 0.154 nm) and soft (wavelength of interest) X-ray mapping of the surface are presented along with a discussion of the technique used to control the d-spacing distribution.

Citation Download Citation

George Gutman, John E. Keem, Kevin Parker, James L. Wood, Richard N. Watts, and Charles Tarrio "New method for achieving accurate thickness control for uniform and graded multilayer coatings on large flat substrates", Proc. SPIE 1742, Multilayer and Grazing Incidence X-Ray/EUV Optics for Astronomy and Projection Lithography, (21 January 1993); https://doi.org/10.1117/12.140602

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available