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CO2 lasers have been used in industry mainly for such things as cutting, welding, and surface processing. To conduct a broad spectrum of high-speed and high-quality applications, most of the developments in industrial CO2 lasers at the ILT are aimed at increasing the output power, optimizing the beam quality, and reducing the production costs. Most of the commercial CO2 lasers above 5 kW are transverse-flow systems using dc excitation. The applications of these lasers are limited due to the lower beam quality, the poor point stability, and the lower modulation frequency. To overcome the problems we developed a fast axial- flow CO2 laser using rf excitation with an output of 13 kW. In section 2 some of the results are discussed concerning the gas flow, the discharge, the resonator design, optical effects of active medium, the aerodynamic window, and the modulation of the output power. The first CO2 lasers ever built are diffusion-cooled systems with conventional dc excited cylindrical discharge tubes surrounded by cooling jackets. The output power per unit length is limited to 50 W/m by those lasers with cylindrical tubes. In the past few years considerable increases in the output power were achieved, using new mechanical geometries, excitation- techniques, and resonator designs. This progress in diffusion-cooled CO2 lasers is presented in section 3.
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