Paper
1 February 1994 Use of laser-plasma-produced soft x rays to study the ultrastructure of living biological material
Anthony D. Stead, Robin A. Cotton, Anton M. Page, J. A. Goode, C. G. Steele, J. G. Duckett, Thomas W. Ford
Author Affiliations +
Abstract
The use of laser-plasma generated soft x rays for contact microscopy offers several advantages over electron microscopy. After chemical development the exposed photoresist can be examined by interference light, scanning electron, or atomic force microscopy. The advantages and disadvantages of each are briefly described and biologically significant results using soft x-ray contact microscopy, followed by examination of the resist by atomic force microscopy, are presented.
© (1994) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Anthony D. Stead, Robin A. Cotton, Anton M. Page, J. A. Goode, C. G. Steele, J. G. Duckett, and Thomas W. Ford "Use of laser-plasma-produced soft x rays to study the ultrastructure of living biological material", Proc. SPIE 2015, Applications of Laser Plasma Radiation, (1 February 1994); https://doi.org/10.1117/12.168011
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Cited by 1 scholarly publication.
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KEYWORDS
X-rays

X-ray microscopy

Atomic force microscopy

Photoresist materials

Carbon

Microscopy

Scanning electron microscopy

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