Fabrication of perfectly three-dimensional microstructures by UV depth lithography

Gunter Engelmann; Oswin Ehrmann; Rudolf Leutenbauer; Heike Schmitz; Herbert Reichl

doi:10.1117/12.167571

1 February 1994 Fabrication of perfectly three-dimensional microstructures by UV depth lithography

Gunter Engelmann, Oswin Ehrmann, Rudolf Leutenbauer, Heike Schmitz, Herbert Reichl

Proceedings Volume 2045, Laser-Assisted Fabrication of Thin Films and Microstructures; (1994) https://doi.org/10.1117/12.167571
Event: Optics Quebec, 1993, Quebec City, Canada

Abstract

Repeated conventional UV depth lithography and electroplating allows us to produce microstructures of varying size in the third dimension. The structures are about 50 micrometers high and the bearing clearances are in the micrometers range. A number of alternative processes and applications are reviewed. The status of the UV depth lithography of positive photoresist and the TUB process for electroplating (Au) high depth-to-width aspect ratio microstructures is briefly described. Capacitive micromotors, a capacitive acceleration sensor, and 3D microcoils have been fabricated. These results are discussed and possible future steps and applications are mentioned.

Citation Download Citation

Gunter Engelmann, Oswin Ehrmann, Rudolf Leutenbauer, Heike Schmitz, and Herbert Reichl "Fabrication of perfectly three-dimensional microstructures by UV depth lithography", Proc. SPIE 2045, Laser-Assisted Fabrication of Thin Films and Microstructures, (1 February 1994); https://doi.org/10.1117/12.167571

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available