Method using an optical needle to measure complex surface roughness and form errors

Wen-Ming Yao; Shu-Wen Cao; Zhu Li; Tie-Bang Xie

doi:10.1117/12.156304

22 September 1993 Method using an optical needle to measure complex surface roughness and form errors

Wen-Ming Yao, Shu-Wen Cao, Zhu Li, Tie-Bang Xie

Proceedings Volume 2101, Measurement Technology and Intelligent Instruments; (1993) https://doi.org/10.1117/12.156304
Event: Measurement Technology and Intelligent Instruments, 1993, Wuhan, China

Abstract

By cabining organically the principle of astiatic location with the grating interferometery and the computer technology, an effective method for measuring the complex surface roughness and form error is put forward in this paper

Citation Download Citation

Wen-Ming Yao, Shu-Wen Cao, Zhu Li, and Tie-Bang Xie "Method using an optical needle to measure complex surface roughness and form errors", Proc. SPIE 2101, Measurement Technology and Intelligent Instruments, (22 September 1993); https://doi.org/10.1117/12.156304

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