New displacement sensor by the principle of fringe-field capacitance

Jun Li; Xin-Xin Li

doi:10.1117/12.156315

22 September 1993 New displacement sensor by the principle of fringe-field capacitance

Jun Li, Xin-Xin Li

Proceedings Volume 2101, Measurement Technology and Intelligent Instruments; (1993) https://doi.org/10.1117/12.156315
Event: Measurement Technology and Intelligent Instruments, 1993, Wuhan, China

Abstract

Usually people like to measure the displacement of a workpiece by using the method of measuring the capacitance between the probe of the sensor and the surface of the workpiece because the measurement is precise and noncontact. But in general its measuring range is so small that the application of this kind of sensor is restricted. Here the principle of fringe-field instead of plate field of the capacitance is used so the surface of the probe is perpendicular instead of parallel to the workpiece surface Compared with the traditional device this one has the advantage of large scale small size high spatial resolution fast response and rugged construction. The principle of this kind of measurement the mathematical analysis and experiments are described in the paper. Some results of the current research in the use of fringe- field sensor system show its potential of wide appl icat ion.

Citation Download Citation

Jun Li and Xin-Xin Li "New displacement sensor by the principle of fringe-field capacitance", Proc. SPIE 2101, Measurement Technology and Intelligent Instruments, (22 September 1993); https://doi.org/10.1117/12.156315

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