Study of several problems of a scanning-tunneling microscope used for microtopography measurement

Shang-Ping Li; Hong-Hai Zhang; Gui-Jin Shuen; Liang-Fu Xie; Ri-Yao Chen; Hanming Shi

doi:10.1117/12.156395

22 September 1993 Study of several problems of a scanning-tunneling microscope used for microtopography measurement

Shang-Ping Li, Hong-Hai Zhang, Gui-Jin Shuen, Liang-Fu Xie, Ri-Yao Chen, Hanming Shi

Proceedings Volume 2101, Measurement Technology and Intelligent Instruments; (1993) https://doi.org/10.1117/12.156395
Event: Measurement Technology and Intelligent Instruments, 1993, Wuhan, China

Abstract

This paper deals with some critical problems about a kind of new long- range scanning tunnelling microscope (STIvI) with atomic resolution which can be used in ultra- precision and microtopography detection, Through theoretical analyses and experiment verification an ultra-feed mechanisms with nm accuracy is introduced. By both analyzing a simplified model and carrying out a sense of experiment a simple and efficient vibration isolating system used for this instrument has been studied thoroughly. Furthermore a simple and reliable tip holding method is also introduced, The experiment results indicated that this instrument can be used for measuring microtopography with nm accuracy.

Citation Download Citation

Shang-Ping Li, Hong-Hai Zhang, Gui-Jin Shuen, Liang-Fu Xie, Ri-Yao Chen, and Hanming Shi "Study of several problems of a scanning-tunneling microscope used for microtopography measurement", Proc. SPIE 2101, Measurement Technology and Intelligent Instruments, (22 September 1993); https://doi.org/10.1117/12.156395

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