Paper
1 April 1994 Inspection and test of flat panel displays
Douglas Hendricks
Author Affiliations +
Proceedings Volume 2174, Advanced Flat Panel Display Technologies; (1994) https://doi.org/10.1117/12.172134
Event: IS&T/SPIE 1994 International Symposium on Electronic Imaging: Science and Technology, 1994, San Jose, CA, United States
Abstract
In the last few years automated optical inspection systems and electrical testers have become an integral part in the AMLCD manufacturing process. The exact techniques for using each of these tools varies somewhat depending on the circumstances but a few general inspection and test strategies are now in common use industry wide. Those strategies are described in this paper with special emphasis given to the inspection and test techniques used by the high- volume AMLCD manufacturers.
© (1994) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Douglas Hendricks "Inspection and test of flat panel displays", Proc. SPIE 2174, Advanced Flat Panel Display Technologies, (1 April 1994); https://doi.org/10.1117/12.172134
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KEYWORDS
Inspection

Optical inspection

Array processing

Manufacturing

LCDs

Photomasks

Light scattering

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