Characterization of microoptical elements by a stand-alone atomic-force microscope

J. Rgen Burger; Nicholas X. Randall; Rainer F. Christoph; Lei Yan; Olivier M. Parriaux

doi:10.1117/12.180984

28 July 1994 Characterization of microoptical elements by a stand-alone atomic-force microscope

J. Rgen Burger, Nicholas X. Randall, Rainer F. Christoph, Lei Yan, Olivier M. Parriaux

Proceedings Volume 2213, Nanofabrication Technologies and Device Integration; (1994) https://doi.org/10.1117/12.180984
Event: Integrated Optoelectronics '94, 1994, Lindau, Germany

Abstract

The microfabrication of optical and micromechanical elements requires a high degree of accuracy in order to obtain the required efficiency in the functionality of the element. An easy, nondestructive 3D characterization of the batch fabricated elements after each fabrication step is needed to ensure a reliable engineering control over the whole process. We demonstrate the versatility of a stand-alone AFM which can be used as a flexible tool for the nondestructive characterization of all steps of a fabrication sequence of microfabricated optical and micromechanical elements without the necessity to specially prepare the samples under test.

Citation Download Citation

J. Rgen Burger, Nicholas X. Randall, Rainer F. Christoph, Lei Yan, and Olivier M. Parriaux "Characterization of microoptical elements by a stand-alone atomic-force microscope", Proc. SPIE 2213, Nanofabrication Technologies and Device Integration, (28 July 1994); https://doi.org/10.1117/12.180984

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available