Paper
16 October 1995 Influence of carbon doping on physical properties of SI GaAs
Andrzej Hruban, S. Strzelecka, M. Gladysz, E. Jurkiewicz Wegner, W. Orlowski, A. Mirowska, M. Piersa, B. Surma
Author Affiliations +
Proceedings Volume 2373, Solid State Crystals: Materials Science and Applications; (1995) https://doi.org/10.1117/12.224972
Event: Solid State Crystals: Materials Science and Applications, 1994, Zakopane, Poland
Abstract
Undoped and C-doped GaAs crystals, grown by the LP LEC and HP LEC techniques have been investigated. Carbon was incorporated into the melt during synthesis of monocrystallization in the range 6 multiplied by 1014 divided by 2 multiplied by 1016 cm-3. Controlled carbon doping allows us to obtain SI GaAs crystals with high resistivity rho greater than 107 (Omega) cm and high mobility mu greater than or equal to 5000 cm2/Vs.
© (1995) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Andrzej Hruban, S. Strzelecka, M. Gladysz, E. Jurkiewicz Wegner, W. Orlowski, A. Mirowska, M. Piersa, and B. Surma "Influence of carbon doping on physical properties of SI GaAs", Proc. SPIE 2373, Solid State Crystals: Materials Science and Applications, (16 October 1995); https://doi.org/10.1117/12.224972
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KEYWORDS
Carbon

Crystals

Gallium arsenide

Information operations

Silicon carbide

Doping

Semiconducting wafers

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