Study of optical proximity effects using off-axis illumination with attenuated phase shift mask

Chang-Nam Ahn; Ki-Ho Baik; Yong-Suk Lee; Hung-Eil Kim; Ikboum Hur; YoungSik Kim; Ju-Hwan Kim; Soo-Han Choi

doi:10.1117/12.209254

26 May 1995 Study of optical proximity effects using off-axis illumination with attenuated phase shift mask

Chang-Nam Ahn, Ki-Ho Baik, Yong-Suk Lee, Hung-Eil Kim, Ikboum Hur, YoungSik Kim, Ju-Hwan Kim, Soo-Han Choi

Proceedings Volume 2440, Optical/Laser Microlithography VIII; (1995) https://doi.org/10.1117/12.209254
Event: SPIE's 1995 Symposium on Microlithography, 1995, Santa Clara, CA, United States

Abstract

The global proximity effects of densed line, semi-isolated line are studied for conventional illumination, off-axis illumination, and finally off-axis illumination in combination with attenuated phase shift masks which have transmittance of 4% and 8%, respectively, by experiments and simulations. To analyze the behavior of proximity effects, the lithographic performances of the super resolution technique are investigated comparing the cross-sectional view of resist pattern profile, useful depth of focus, and the curves of linewidth vs. defocus for 0.30 micrometers , 0.35 micrometers , and 0.40 micrometers pattern size, respectively. The global proximity effect is quantitatively analyzed by fitting the curve for densed line and isolated line to 2nd order polynomials. Off- axis illumination with attenuated phase shift mask is very effective to minimize the proximity effects for the pattern size less than 0.40 micrometers , and have useful depth of focus of 1.0 micrometers for 0.30 micrometers patterns.

Citation Download Citation

Chang-Nam Ahn, Ki-Ho Baik, Yong-Suk Lee, Hung-Eil Kim, Ikboum Hur, YoungSik Kim, Ju-Hwan Kim, and Soo-Han Choi "Study of optical proximity effects using off-axis illumination with attenuated phase shift mask", Proc. SPIE 2440, Optical/Laser Microlithography VIII, (26 May 1995); https://doi.org/10.1117/12.209254

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available